Design and simulation of film bulk acoustic wave resonator (FBAR) gas sensor based on ZnO thin film

• Main Authors: Zarifsofia, Sabani, Aliza Aini, Md Ralib, Karim, Jamilah, Saidin, Norazlina, Mohamad Razali, Nur Fatin
• Format: Conference or Workshop Item
• Language: English; English
• Published: Institute of Electrical and Electronics Engineers Inc. 2019
• Subjects: TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
• Online Access: http://irep.iium.edu.my/78998/1/78998_Design%20and%20simulation%20of%20Film%20Bulk%20_complete%20conf.%20article.pdf; http://irep.iium.edu.my/78998/2/78998_Design%20and%20simulation%20of%20Film%20Bulk%20_scopus.pdf; http://irep.iium.edu.my/78998/; https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8943566

The interest in miniature device has led to the development of thin film bulk acoustic wave resonator (FBAR). The function of a resonator to gain a high resonant frequency value of an equipment make FBAR is suitable to act as sensor and filter for wide range of applications. The success of FBAR in p...