Design and implementation of a 1GHz CMOS resonator utilizing surface acoustic wave
The design and fabrication of an integrated 1GHz surface acoustic wave (SAW) resonator is described in this paper. The SAW resonator was fabricated using a combination of CMOS plus surface micromachining techniques. Utilizing the minimum feature size of the available 0.6 micron AMI CMOS process, the...
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| Main Authors: | , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2006
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/3718/1/21.pdf http://irep.iium.edu.my/3718/ http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=1693384 |
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