Silicon nanostructure based surface acoustic wave gas sensor
Surface acoustic wave (SAW) gas sensors with a nanostructured material-based sensing layer are highly desirable in microelectromechanical systems (MEMS) gas sensors to achieve improved sensitivity, time response, and recovery time. Herein, a novel SAW gas sensor with a nanostructured silicon (Si)-ba...
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my.utm.988632023-02-02T09:54:26Z http://eprints.utm.my/id/eprint/98863/ Silicon nanostructure based surface acoustic wave gas sensor Asri, Muhammad Izzudin Ahmad Hasan, Mohammed Nazibul Md. Yunos, Yusri Nafea, Marwan Mohamed Ali, Mohamed Sultan TK Electrical engineering. Electronics Nuclear engineering Surface acoustic wave (SAW) gas sensors with a nanostructured material-based sensing layer are highly desirable in microelectromechanical systems (MEMS) gas sensors to achieve improved sensitivity, time response, and recovery time. Herein, a novel SAW gas sensor with a nanostructured silicon (Si)-based sensing layer was developed. Finite element analysis was employed to determine the dimensions of the sensing material. Moreover, a SAW sensor with a four-pair input/output aluminium interdigital transducer (IDT) was fabricated and tested with carbon dioxide gas (CO2), with a concentration in the range of 500-2000 ppm. The results reveal that an Si nanostructure produces better sensitivity, and faster response and recovery time, compared to a layered Si-based SAW sensor. At 2000 ppm, a frequency shift of 4.62 kHz was recorded, while the time response and recovery time of 31 s and 40.5 s was reported, respectively. The proposed Si nanostructure as the sensing layer for the SAW gas sensor demonstrated significant performance with higher sensitivity than previously reported devices, and has the potential to act as a next generation MEMS SAW gas sensor. 2022 Conference or Workshop Item PeerReviewed Asri, Muhammad Izzudin Ahmad and Hasan, Mohammed Nazibul and Md. Yunos, Yusri and Nafea, Marwan and Mohamed Ali, Mohamed Sultan (2022) Silicon nanostructure based surface acoustic wave gas sensor. In: 2022 IEEE Sensors Conference, SENSORS 2022, 30 October 2022 - 2 November 2022, Dallas, Texas, USA. http://dx.doi.org/10.1109/SENSORS52175.2022.9967303 |
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TK Electrical engineering. Electronics Nuclear engineering Asri, Muhammad Izzudin Ahmad Hasan, Mohammed Nazibul Md. Yunos, Yusri Nafea, Marwan Mohamed Ali, Mohamed Sultan Silicon nanostructure based surface acoustic wave gas sensor |
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Surface acoustic wave (SAW) gas sensors with a nanostructured material-based sensing layer are highly desirable in microelectromechanical systems (MEMS) gas sensors to achieve improved sensitivity, time response, and recovery time. Herein, a novel SAW gas sensor with a nanostructured silicon (Si)-based sensing layer was developed. Finite element analysis was employed to determine the dimensions of the sensing material. Moreover, a SAW sensor with a four-pair input/output aluminium interdigital transducer (IDT) was fabricated and tested with carbon dioxide gas (CO2), with a concentration in the range of 500-2000 ppm. The results reveal that an Si nanostructure produces better sensitivity, and faster response and recovery time, compared to a layered Si-based SAW sensor. At 2000 ppm, a frequency shift of 4.62 kHz was recorded, while the time response and recovery time of 31 s and 40.5 s was reported, respectively. The proposed Si nanostructure as the sensing layer for the SAW gas sensor demonstrated significant performance with higher sensitivity than previously reported devices, and has the potential to act as a next generation MEMS SAW gas sensor. |
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Conference or Workshop Item |
author |
Asri, Muhammad Izzudin Ahmad Hasan, Mohammed Nazibul Md. Yunos, Yusri Nafea, Marwan Mohamed Ali, Mohamed Sultan |
author_facet |
Asri, Muhammad Izzudin Ahmad Hasan, Mohammed Nazibul Md. Yunos, Yusri Nafea, Marwan Mohamed Ali, Mohamed Sultan |
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Asri, Muhammad Izzudin Ahmad |
title |
Silicon nanostructure based surface acoustic wave gas sensor |
title_short |
Silicon nanostructure based surface acoustic wave gas sensor |
title_full |
Silicon nanostructure based surface acoustic wave gas sensor |
title_fullStr |
Silicon nanostructure based surface acoustic wave gas sensor |
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Silicon nanostructure based surface acoustic wave gas sensor |
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silicon nanostructure based surface acoustic wave gas sensor |
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2022 |
url |
http://eprints.utm.my/id/eprint/98863/ http://dx.doi.org/10.1109/SENSORS52175.2022.9967303 |
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1758578029945159680 |
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13.160551 |