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MEMS actuators for biomedical applications: a review

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Bibliographic Details
Main Authors:	Mohd. Ghazali, Farah Afiqa, Hasan, Md. Nazibul, Rehman, Tariq, Nafea, Marwan
Format:	Article
Published:	Institute of Physics Publishing 2020
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://eprints.utm.my/id/eprint/93936/ http://dx.doi.org/10.1088/1361-6439/ab8832
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