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Simulation of MEMS capacitive thermal sensor based on tip deflection of a functionally graded micro-beam

This work presents a simulation study on a novel micro thermal sensor to evaluate a different range of temperature. Micro Electro Mechanical Systems (MEMS) technology is an interesting field in mechanics and metrology. In this work, a capacitive micro thermal sensor based on tip deflection of Functi...

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Bibliographic Details
Main Authors:	Ghadim, Mohammad Abbasgholipour, Mailah, Musa, Alasti, Behzad Mohammadi, Ghadim, Mehdi Abbasgholipour
Format:	Article
Published:	Trans Tech Publications 2014
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://eprints.utm.my/id/eprint/62585/ http://dx.doi.org/10.4028/www.scientific.net/AMR.845.340
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