Simulation of MEMS capacitive thermal sensor based on tip deflection of a functionally graded micro-beam

• Main Authors: Ghadim, Mohammad Abbasgholipour, Mailah, Musa, Alasti, Behzad Mohammadi, Ghadim, Mehdi Abbasgholipour
• Format: Article
• Published: Trans Tech Publications 2014
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://eprints.utm.my/id/eprint/62585/; http://dx.doi.org/10.4028/www.scientific.net/AMR.845.340

This work presents a simulation study on a novel micro thermal sensor to evaluate a different range of temperature. Micro Electro Mechanical Systems (MEMS) technology is an interesting field in mechanics and metrology. In this work, a capacitive micro thermal sensor based on tip deflection of Functi...