Simulation of MEMS capacitive thermal sensor based on tip deflection of a functionally graded micro-beam

• Main Authors: Ghadim, Mohammad Abbasgholipour, Mailah, Musa, Alasti, Behzad Mohammadi, Ghadim, Mehdi Abbasgholipour
• Format: Article
• Published: Trans Tech Publications 2014
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://eprints.utm.my/id/eprint/62585/; http://dx.doi.org/10.4028/www.scientific.net/AMR.845.340

This work presents a simulation study on a novel micro thermal sensor to evaluate a different range of temperature. Micro Electro Mechanical Systems (MEMS) technology is an interesting field in mechanics and metrology. In this work, a capacitive micro thermal sensor based on tip deflection of Functionally Graded Micro-beam (FGM) was designed. The thermo-electric mechanical equations based on Euler-Bernoulli beam theory were derived and solved using step-bystep linearization method. The increase in temperature was expressed with respect to the changes in the capacitance. The beam deflections were compared with the existing results showing good conformity with the highest error obtained as 4.3% at 65°C.