Simulation of MEMS capacitive thermal sensor based on tip deflection of a functionally graded micro-beam
This work presents a simulation study on a novel micro thermal sensor to evaluate a different range of temperature. Micro Electro Mechanical Systems (MEMS) technology is an interesting field in mechanics and metrology. In this work, a capacitive micro thermal sensor based on tip deflection of Functi...
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my.utm.625852017-06-18T07:10:11Z http://eprints.utm.my/id/eprint/62585/ Simulation of MEMS capacitive thermal sensor based on tip deflection of a functionally graded micro-beam Ghadim, Mohammad Abbasgholipour Mailah, Musa Alasti, Behzad Mohammadi Ghadim, Mehdi Abbasgholipour TJ Mechanical engineering and machinery This work presents a simulation study on a novel micro thermal sensor to evaluate a different range of temperature. Micro Electro Mechanical Systems (MEMS) technology is an interesting field in mechanics and metrology. In this work, a capacitive micro thermal sensor based on tip deflection of Functionally Graded Micro-beam (FGM) was designed. The thermo-electric mechanical equations based on Euler-Bernoulli beam theory were derived and solved using step-bystep linearization method. The increase in temperature was expressed with respect to the changes in the capacitance. The beam deflections were compared with the existing results showing good conformity with the highest error obtained as 4.3% at 65°C. Trans Tech Publications 2014 Article PeerReviewed Ghadim, Mohammad Abbasgholipour and Mailah, Musa and Alasti, Behzad Mohammadi and Ghadim, Mehdi Abbasgholipour (2014) Simulation of MEMS capacitive thermal sensor based on tip deflection of a functionally graded micro-beam. Advanced Materials Research, 845 . pp. 340-344. ISSN 1022-6680 http://dx.doi.org/10.4028/www.scientific.net/AMR.845.340 |
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TJ Mechanical engineering and machinery Ghadim, Mohammad Abbasgholipour Mailah, Musa Alasti, Behzad Mohammadi Ghadim, Mehdi Abbasgholipour Simulation of MEMS capacitive thermal sensor based on tip deflection of a functionally graded micro-beam |
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This work presents a simulation study on a novel micro thermal sensor to evaluate a different range of temperature. Micro Electro Mechanical Systems (MEMS) technology is an interesting field in mechanics and metrology. In this work, a capacitive micro thermal sensor based on tip deflection of Functionally Graded Micro-beam (FGM) was designed. The thermo-electric mechanical equations based on Euler-Bernoulli beam theory were derived and solved using step-bystep linearization method. The increase in temperature was expressed with respect to the changes in the capacitance. The beam deflections were compared with the existing results showing good conformity with the highest error obtained as 4.3% at 65°C. |
format |
Article |
author |
Ghadim, Mohammad Abbasgholipour Mailah, Musa Alasti, Behzad Mohammadi Ghadim, Mehdi Abbasgholipour |
author_facet |
Ghadim, Mohammad Abbasgholipour Mailah, Musa Alasti, Behzad Mohammadi Ghadim, Mehdi Abbasgholipour |
author_sort |
Ghadim, Mohammad Abbasgholipour |
title |
Simulation of MEMS capacitive thermal sensor based on tip deflection of a functionally graded micro-beam |
title_short |
Simulation of MEMS capacitive thermal sensor based on tip deflection of a functionally graded micro-beam |
title_full |
Simulation of MEMS capacitive thermal sensor based on tip deflection of a functionally graded micro-beam |
title_fullStr |
Simulation of MEMS capacitive thermal sensor based on tip deflection of a functionally graded micro-beam |
title_full_unstemmed |
Simulation of MEMS capacitive thermal sensor based on tip deflection of a functionally graded micro-beam |
title_sort |
simulation of mems capacitive thermal sensor based on tip deflection of a functionally graded micro-beam |
publisher |
Trans Tech Publications |
publishDate |
2014 |
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http://eprints.utm.my/id/eprint/62585/ http://dx.doi.org/10.4028/www.scientific.net/AMR.845.340 |
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13.18916 |