Carbon thin films deposition by KRF pulsed laser at different temperatures

The surface morphology of carbon thin films deposited at temperatures 20°C and 300°C have been done by Atomic Force Microscope (AFM). The 10,000 pulses of KrF Excimer laser of wavelength 248 nm, pulse energy 13-50 mJ and pulse width 20 ns was focused at an angle of 45° to ablate pure graphite target...

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Bibliographic Details
Main Authors: Qindeel, Rabia, Ali, Jalil, Hussain, M. S., Chaudhary, K. T.
Format: Article
Published: Institute of Electrical and Electronics Engineers 2011
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Online Access:http://eprints.utm.my/id/eprint/44770/
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