Carbon thin films deposition by KRF pulsed laser at different temperatures
The surface morphology of carbon thin films deposited at temperatures 20°C and 300°C have been done by Atomic Force Microscope (AFM). The 10,000 pulses of KrF Excimer laser of wavelength 248 nm, pulse energy 13-50 mJ and pulse width 20 ns was focused at an angle of 45° to ablate pure graphite target...
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| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Institute of Electrical and Electronics Engineers
2011
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/44770/ |
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