Investigation of carbon thin films by pulsed laser deposition at different temperatures

• Main Authors: Qindeel, Rabia, Chaudhary, Kashif Tufail, Bhatti, Khurshid Aslam, Hussain, Muhammad Sakhawat, Ali, Jalil
• Format: Article
• Published: 2010
• Subjects: Q Science
• Online Access: http://eprints.utm.my/id/eprint/26296/

Effect of temperature on the deposition of Carbon thin Film is reported in this paper. KrF Excimer laser (248 nm, 13-50 mJ and 20 ns) is focused at an angle of 45° on pure graphite target. Silicon (111) wafer, as a substrate is placed at distance of 15 mm from the target surface. The carbon thin fil...