Effects of pressure and substrate temperature on the growth of Al-doped ZnO films by pulsed laser deposition

• Main Authors: Kek, Reeson, Tan, Kwan Chu, Nee, Chen Hon, Yap, Seong Ling, Koh, Song Foo, Arof, Abdul Kariem, Tou, Teck Yong, Yap, Seong Shan
• Format: Article
• Published: IOP Publishing 2020
• Subjects: QC Physics
• Online Access: http://eprints.um.edu.my/24216/; https://doi.org/10.1088/2053-1591/ab62f8

Al-doped ZnO (AZO) thin films were deposited on p-Si (100) by pulsed laser deposition from a composite ceramic target (ZnO:Al2O3) by using 355 nm laser at different O2 background pressure and substrate temperature. Upon ablation at laser fluence of 2 Jcm-2, plasma plume consists of Zn neutrals and i...