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Electrical properties of copper nitride thin film prepared by reactive DC sputtering

The purpose of this research is to study the electrical properties of copper nitride (Cu3N) thin films. Cu3N were deposited on corning glass substrates by using reactive DC sputtering technique. Four samples were prepared with different deposition time to obtain samples of different thicknesses. The...

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書目詳細資料
主要作者:	Wan Mohd. Noral Azman, Wan Noor Ezianti
格式:	Thesis
語言:	English
出版:	2013
主題:	Q Science (General)
在線閱讀:	http://eprints.utm.my/id/eprint/32043/1/WanNoorEziantiMFS2013.pdf http://eprints.utm.my/id/eprint/32043/
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