Electronic conduction processes in amorphous silicon-carbon thin films prepared by RF magnetron sputtering

• Main Authors: Lau, Chen Chen, Ismai, B., Muhammad, R., Yusuf, M. N.
• Format: Conference or Workshop Item
• Language: English
• Published: 2004
• Subjects: Unspecified
• Online Access: http://eprints.utm.my/id/eprint/20810/1/RMuhammad2004_ElectronicConductionProcessInAmorphous.pdf; http://eprints.utm.my/id/eprint/20810/

Thin films of amorphous silicon-carbon alloy (a-Si:C:H) were prepared by RF magnetron sputtering onto glass substrates maintained at room temperature. Aluminium (Al) electrodes were provided by thermal evaporation to form sandwich structures. The amorphous state of the films was confirmed by XRD ana...