Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication

This paper outlines the basic characteristics and the control performances of a multilayer electrostatic actuator utilized for a fine motion stage without precise balls. The research was undertaken in order to realize a practical and simple multilayer electrostatic actuator that produces high precis...

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Bibliographic Details
Main Author: Md Ghazaly, Mariam
Format: Conference or Workshop Item
Language:English
Published: 2011
Subjects:
Online Access:http://eprints.utem.edu.my/id/eprint/8972/1/ICOMM-2011.pdf
http://eprints.utem.edu.my/id/eprint/8972/
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