Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication

• Main Author: Md Ghazaly, Mariam
• Format: Conference or Workshop Item
• Language: English
• Published: 2011
• Subjects: TJ Mechanical engineering and machinery; TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utem.edu.my/id/eprint/8972/1/ICOMM-2011.pdf; http://eprints.utem.edu.my/id/eprint/8972/

This paper outlines the basic characteristics and the control performances of a multilayer electrostatic actuator utilized for a fine motion stage without precise balls. The research was undertaken in order to realize a practical and simple multilayer electrostatic actuator that produces high precision motion and sufficient force for a fine motion stage. For this purpose, a two-layer electrostatic actuator was developed and evaluated. Lubrication oils are used as lubricants in order to obtain low friction by maintaining the gaps between the stator and mover layers without precise balls for simplicity and easy maintenance. Each layer of the electrostatic actuator has one electrode, which consists of several beams. The motion characteristics of the electrostatic actuator without precise balls depend on the input signal to the actuator, which consequently influences the frictional effect. First, this paper examines the resultant effects of the driving signals on the motion characteristics. Next, based on the driving signal, the control system for the actuator is designed. The control system includes the PID compensator and the driving signal unit which generates the suitable signal for full working range motion. The actuator exhibits the positioning accuracy better than 15nm.