Modelling of surface roughness for glass-assisted co2 laser machined p-type silicon wafer

• Main Authors: Sivarao, Subramonian, Prasath, K.P., Ramesh, S., Kadirgama, Kumaran, Pujari, S., Vatesh, Umesh Kumar, Salleh, Mohd Shukor, Ali, Mohd Amran, Maidin, Shajahan
• Format: Conference or Workshop Item
• Language: English
• Published: 2023
• Online Access: http://eprints.utem.edu.my/id/eprint/27894/1/Modelling%20of%20surface%20roughness%20for%20glass-assisted%20co2%20laser%20machined%20p-type%20silicon%20wafer.pdf; http://eprints.utem.edu.my/id/eprint/27894/; https://pubs.aip.org/aip/acp/article-abstract/2643/1/050034/2872864/Modelling-of-surface-roughness-for-glass-assisted?redirectedFrom=fulltext

Carbon Dioxide (CO2) Laser Machining has been in high demand as compared to other high-end conventional machining processes as it is capable of producing super precision cutting with a non-contact technology. The objective of this research is to establish mathematical model to predict laser cut su...