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Friction Characteristic Switching Function and Ultra-Precision Positioning of Multilayer Electrostatic Actuator

The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage.

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Bibliographic Details
Main Author: Md Ghazaly, Mariam
Format: Conference or Workshop Item
Language:English
Published: 2012
Subjects:
TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utem.edu.my/id/eprint/10987/1/JSME_SPRING_MEETING.pdf
http://eprints.utem.edu.my/id/eprint/10987/
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id my.utem.eprints.10987
record_format eprints
spelling my.utem.eprints.109872015-05-28T04:14:41Z http://eprints.utem.edu.my/id/eprint/10987/ Friction Characteristic Switching Function and Ultra-Precision Positioning of Multilayer Electrostatic Actuator Md Ghazaly, Mariam TJ Mechanical engineering and machinery TK Electrical engineering. Electronics Nuclear engineering The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage. 2012-03-16 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.utem.edu.my/id/eprint/10987/1/JSME_SPRING_MEETING.pdf Md Ghazaly, Mariam (2012) Friction Characteristic Switching Function and Ultra-Precision Positioning of Multilayer Electrostatic Actuator. In: 2012 JSPE Spring Meeting (2012), March 2012, Japan.
institution Universiti Teknikal Malaysia Melaka
building UTEM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknikal Malaysia Melaka
content_source UTEM Institutional Repository
url_provider http://eprints.utem.edu.my/
language English
topic TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
Md Ghazaly, Mariam
Friction Characteristic Switching Function and Ultra-Precision Positioning of Multilayer Electrostatic Actuator
description The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage.
format Conference or Workshop Item
author Md Ghazaly, Mariam
author_facet Md Ghazaly, Mariam
author_sort Md Ghazaly, Mariam
title Friction Characteristic Switching Function and Ultra-Precision Positioning of Multilayer Electrostatic Actuator
title_short Friction Characteristic Switching Function and Ultra-Precision Positioning of Multilayer Electrostatic Actuator
title_full Friction Characteristic Switching Function and Ultra-Precision Positioning of Multilayer Electrostatic Actuator
title_fullStr Friction Characteristic Switching Function and Ultra-Precision Positioning of Multilayer Electrostatic Actuator
title_full_unstemmed Friction Characteristic Switching Function and Ultra-Precision Positioning of Multilayer Electrostatic Actuator
title_sort friction characteristic switching function and ultra-precision positioning of multilayer electrostatic actuator
publishDate 2012
url http://eprints.utem.edu.my/id/eprint/10987/1/JSME_SPRING_MEETING.pdf
http://eprints.utem.edu.my/id/eprint/10987/
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score 13.160551

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