Modeling of TiN Coating Thickness Using RSM Approach
In this paper, modeling of Titanium Nitrite (TiN) coating thickness using Response Surface Method (RSM) is implemented. Insert cutting tools were coated with TiN using Physical Vapor Deposition (PVD) sputtering process. N2 pressure, Argon pressure and turntable speed were selected as process variab...
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Main Authors: | Mohamad Jaya, Abdul Syukor, Mohd Hashim, Siti Zaiton, Haron, Habibollah, Muhamad, Muhd. Razali, Hasan Basari, Abd Samad, Abd. Rahman, Md. Nizam |
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Format: | Article |
Language: | English |
Published: |
Trans tech Publication, Switzerland
2014
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Subjects: | |
Online Access: | http://eprints.utem.edu.my/id/eprint/10673/1/Modeling_of_TiN_Coating_Thickness_Using_RSM_Approach.pdf http://eprints.utem.edu.my/id/eprint/10673/ |
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