Predictive modeling of tin coating roughness

• Main Authors: Mohamad Jaya, Abdul Syukor, Mohd Hashim, Siti Zaiton, Haron, Habibollah, Muhamad, Muhd Razali, Abd Rahman, Md Nizam, Hassan Basari, Abd Samad
• Format: Conference or Workshop Item
• Published: 2013
• Subjects: QA75 Electronic computers. Computer science
• Online Access: http://eprints.utm.my/id/eprint/51254/; http://apps.webofknowledge.com.ezproxy.utm.my/full_record.do?product=WOS&search_mode=GeneralSearch&qid=10&SID=R2Cjh3fA6kIeWhVr585&page=1&doc=2

In this paper, an approach in modeling surface roughness of Titanium Nitrite (TiN) coating using Response Surface Method (RSM) is implemented. The TiN coatings were formed using Physical Vapor Deposition (PVD) sputtering process. N-2 pressure, Argon pressure and turntable speed were selected as proc...