Modeling of ANFIS in predicting TiN coatings roughness

• Main Authors: Jaya, A. S. M., Hashim, S.Z.M., Haron, H., Ngah, Razali, Muhamad, M.R., Rahman, M. N. A.
• Format: Conference or Workshop Item
• Language: English
• Published: 2013
• Subjects: QA75 Electronic computers. Computer science
• Online Access: http://eprints.utem.edu.my/id/eprint/10672/1/Modeling_of_ANFIS_in_Predicting_TiN_Coatings_Roughness.pdf; http://eprints.utem.edu.my/id/eprint/10672/; http://ieeexplore.ieee.org/

In this paper, an approach in predicting surface roughness of Titanium Aluminum Nitrite (TiN) coatings using Adaptive Network Based Fuzzy Inference System (ANFIS) is implemented. The TiN coatings were coated on tungsten carbide(WC) using Physical Vapor Deposition (PVD) magnetron sputtering process....