Modeling of TiN coating thickness using ANFIS

In this paper, an approach in predicting thickness of Titanium Aluminum Nitrite (TiN) coatings using Adaptive Network Based Fuzzy Inference System (ANFIS) is implemented. The TiN coatings were coated on tungsten carbide (WC) using Physical Vapor Deposition (PVD) magnetron sputtering process. The...

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Bibliographic Details
Main Authors: Abdul Syukor, Mohamad Jaya, Abd. Samad, Hasan Basari, Sazalinsyah, Razali, Muhd Razali, Muhamad, Md. Nizam, Ab. Rahman
Format: Book
Language:English
Published: Trans Tech Publications 2014
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Online Access:http://eprints.utem.edu.my/id/eprint/14137/1/Modeling_of_TiN_Coating_Thickness_Using_ANFIS.pdf
http://eprints.utem.edu.my/id/eprint/14137/
http://www.scientific.net/AMM.575.3
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