Effect of cathodic arc PVD parameters on roughness of TiN coating on steel substrate
Titanium nitride which is widely used as a hard coating material was coated on tool steel, by physical vapor deposition method. Surface roughness was investigated as a function of deposition rate, substrate bias and temperature, nitrogen flow rate and metal ion etching. The study showed that increas...
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| Main Authors: | , , , |
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| Format: | Article |
| Published: |
2010
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/25117/ http://dx.doi.org/10.1016/j.cap.2009.07.007 |
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