Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection
A highly sensitive silicon nanowire (SiNW)-based sensor device was developed using electron beam lithography integrated with complementary metal oxide semiconductor (CMOS) technology. The top-down fabrication approach enables the rapid fabrication of device miniaturization with uniform and strictly...
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Main Authors: | Abd Rahman, Siti Fatimah, Yusof, Nor Azah, Md Arshad, Mohd Khairuddin, Hashim, Uda, Md Nor, Mohammad Nuzaihan, Hamidon, Mohd Nizar |
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Format: | Article |
Published: |
Multidisciplinary Digital Publishing Institute
2022
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Online Access: | http://psasir.upm.edu.my/id/eprint/101455/ https://www.mdpi.com/2079-4991/12/15/2652 |
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