Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection

• Main Authors: Abd Rahman, Siti Fatimah, Yusof, Nor Azah, Md Arshad, Mohd Khairuddin, Hashim, Uda, Md Nor, Mohammad Nuzaihan, Hamidon, Mohd Nizar
• Format: Article
• Published: Multidisciplinary Digital Publishing Institute 2022
• Online Access: http://psasir.upm.edu.my/id/eprint/101455/; https://www.mdpi.com/2079-4991/12/15/2652

A highly sensitive silicon nanowire (SiNW)-based sensor device was developed using electron beam lithography integrated with complementary metal oxide semiconductor (CMOS) technology. The top-down fabrication approach enables the rapid fabrication of device miniaturization with uniform and strictly...