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MOS Transistor Mask Design Using SEM Based E-Beam Lithography

Prof. Dr. Uda Hashim and his team won silver for MOS Transistor Mask Design Using SEM Based E-Beam Lithography at ITEX 2006, 19th - 21st May 2006 at Kuala Lumpur Convention Centre (KLCC), Kuala Lumpur.

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書誌詳細
主要な著者:	Uda, Hashim, Prof. Dr., Nur Hamidah, Abdul Halim, Mohammad Nuzaihan, Md Nor, Zul Azhar, Zahid Jamal, Prof. Dr.
その他の著者:	uda@kukum.edu.my
フォーマット:	Image
言語:	English
出版事項:	Malaysian Invention & Design Society (MINDS) 2010
主題:	E-Beam Lithography (EBL) MOS Transistor Mask Design KUKUM > Research International Invention, Innovation & Technology Exhibition ITEX 2006
オンライン･アクセス:	http://dspace.unimap.edu.my/xmlui/handle/123456789/8345
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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