Design and process development of silicon nanowire based DNA biosensor using electron beam lithography

• Main Authors: Uda, Hashim, Siti Fatimah, Abd Rahman, Mohammad Nuzaihan, Md Nor, Shahrir, Salleh
• Other Authors: [e-mail]
• Format: Article
• Language: English
• Published: Institute of Electrical and Electronics Engineering (IEEE) 2009
• Subjects: Biosensors; DNA hybridization; Electron beam lithography; Nanowire; Nanofabrication; Biomolecular electronics; Semiconductors
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/7370

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