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Design and process development of silicon nanowire based DNA biosensor using electron beam lithography

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Main Authors: Uda, Hashim, Siti Fatimah, Abd Rahman, Mohammad Nuzaihan, Md Nor, Shahrir, Salleh
Other Authors: uda@unimap.edu.my
Format: Article
Language:English
Published: Institute of Electrical and Electronics Engineering (IEEE) 2009
Subjects:
Biosensors
DNA hybridization
Electron beam lithography
Nanowire
Nanofabrication
Biomolecular electronics
Semiconductors
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/7370
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spelling my.unimap-73702010-11-24T02:20:50Z Design and process development of silicon nanowire based DNA biosensor using electron beam lithography Uda, Hashim Siti Fatimah, Abd Rahman Mohammad Nuzaihan, Md Nor Shahrir, Salleh uda@unimap.edu.my Biosensors DNA hybridization Electron beam lithography Nanowire Nanofabrication Biomolecular electronics Semiconductors Link to publisher's homepage at http://ieeexplore.ieee.org Silicon nanowires (SiNWs) have their unique feature such as similar diameters to biomolecules, chemically tailorable physical properties, enable to apply in biomolecule detection and can be fabricated as a high performance field effect transistor (FET). This research describes the fabrication of silicon nanowire for DNA hybridization detection in biosensor application. The silicon nanowire with line-width of <100 nm is successfully fabricated by electron beam lithography and will follow by deposition of contact metals. Aurum is a suitable metal to make Ohmic contact with SiNWs and its exhibit electrical transport measurements of the devices. The presence of the hybridization DNA will induce electronic charge and changed the electronic properties of the transistor from which detectable electronic signals are generated. 2009-12-06T02:09:25Z 2009-12-06T02:09:25Z 2008-12-01 Article p.1-6 978-1-4244-2315-6 http://ieeexplore.ieee.org/xpls/abs_all.jsp?=&arnumber=4786648 http://hdl.handle.net/123456789/7370 en International Conference on Electronic Design (ICED 2008) Institute of Electrical and Electronics Engineering (IEEE)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Biosensors
DNA hybridization
Electron beam lithography
Nanowire
Nanofabrication
Biomolecular electronics
Semiconductors
spellingShingle Biosensors
DNA hybridization
Electron beam lithography
Nanowire
Nanofabrication
Biomolecular electronics
Semiconductors
Uda, Hashim
Siti Fatimah, Abd Rahman
Mohammad Nuzaihan, Md Nor
Shahrir, Salleh
Design and process development of silicon nanowire based DNA biosensor using electron beam lithography
description Link to publisher's homepage at http://ieeexplore.ieee.org
author2 uda@unimap.edu.my
author_facet uda@unimap.edu.my
Uda, Hashim
Siti Fatimah, Abd Rahman
Mohammad Nuzaihan, Md Nor
Shahrir, Salleh
format Article
author Uda, Hashim
Siti Fatimah, Abd Rahman
Mohammad Nuzaihan, Md Nor
Shahrir, Salleh
author_sort Uda, Hashim
title Design and process development of silicon nanowire based DNA biosensor using electron beam lithography
title_short Design and process development of silicon nanowire based DNA biosensor using electron beam lithography
title_full Design and process development of silicon nanowire based DNA biosensor using electron beam lithography
title_fullStr Design and process development of silicon nanowire based DNA biosensor using electron beam lithography
title_full_unstemmed Design and process development of silicon nanowire based DNA biosensor using electron beam lithography
title_sort design and process development of silicon nanowire based dna biosensor using electron beam lithography
publisher Institute of Electrical and Electronics Engineering (IEEE)
publishDate 2009
url http://dspace.unimap.edu.my/xmlui/handle/123456789/7370
_version_ 1643788796403122176
score 13.214268

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