CoSi2 formation with a thin Ti interlayer-Ti capping layer and Ti capping layer
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Main Authors: | Abdul Aziz, A., Lim, C.O., Hassan, Z., Zul Azhar Zahid, Jamal |
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Format: | Book chapter |
Language: | English |
Published: |
School of Microelectronic Engineering
2013
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Subjects: | |
Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/30798 |
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