CoSi2 formation with a thin Ti interlayer-Ti capping layer and Ti capping layer

Not Available

Saved in:
Bibliographic Details
Main Authors: Abdul Aziz, A., Lim, C.O., Hassan, Z., Zul Azhar Zahid, Jamal
Format: Book chapter
Language:English
Published: School of Microelectronic Engineering 2013
Subjects:
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/30798
Tags: Add Tag
No Tags, Be the first to tag this record!