CoSi2 formation with a thin Ti interlayer-Ti capping layer and Ti capping layer
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| Main Authors: | , , , |
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| Format: | Book chapter |
| Language: | English |
| Published: |
School of Microelectronic Engineering
2013
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| Subjects: | |
| Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/30798 |
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