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CoSi2 formation with a thin Ti interlayer-Ti capping layer and Ti capping layer

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Main Authors: Abdul Aziz, A., Lim, C.O., Hassan, Z., Zul Azhar Zahid, Jamal
Format: Book chapter
Language:English
Published: School of Microelectronic Engineering 2013
Subjects:
Titanium
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/30798
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id my.unimap-30798
record_format dspace
spelling my.unimap-307982013-12-23T08:31:13Z CoSi2 formation with a thin Ti interlayer-Ti capping layer and Ti capping layer Abdul Aziz, A. Lim, C.O. Hassan, Z. Zul Azhar Zahid, Jamal Titanium Not Available 2013-12-23T08:31:13Z 2013-12-23T08:31:13Z 2005-12-31 Book chapter Abdul Aziz, A., Lim, C.O., Hassan, Z., Jamal, Z. CoSi2 formation with a thin http://hdl.handle.net/123456789/30798 en Recent Advances in Multidisciplinary Applied Physics;2005 School of Microelectronic Engineering
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Titanium
spellingShingle Titanium
Abdul Aziz, A.
Lim, C.O.
Hassan, Z.
Zul Azhar Zahid, Jamal
CoSi2 formation with a thin Ti interlayer-Ti capping layer and Ti capping layer
description Not Available
format Book chapter
author Abdul Aziz, A.
Lim, C.O.
Hassan, Z.
Zul Azhar Zahid, Jamal
author_facet Abdul Aziz, A.
Lim, C.O.
Hassan, Z.
Zul Azhar Zahid, Jamal
author_sort Abdul Aziz, A.
title CoSi2 formation with a thin Ti interlayer-Ti capping layer and Ti capping layer
title_short CoSi2 formation with a thin Ti interlayer-Ti capping layer and Ti capping layer
title_full CoSi2 formation with a thin Ti interlayer-Ti capping layer and Ti capping layer
title_fullStr CoSi2 formation with a thin Ti interlayer-Ti capping layer and Ti capping layer
title_full_unstemmed CoSi2 formation with a thin Ti interlayer-Ti capping layer and Ti capping layer
title_sort cosi2 formation with a thin ti interlayer-ti capping layer and ti capping layer
publisher School of Microelectronic Engineering
publishDate 2013
url http://dspace.unimap.edu.my/xmlui/handle/123456789/30798
_version_ 1643796384673955840
score 13.160551

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