Description: CoSi2 formation with a thin Ti interlayer-Ti capping layer and Ti capping layer

Not Available

Saved in:

Bibliographic Details
Main Authors:	Abdul Aziz, A., Lim, C.O., Hassan, Z., Zul Azhar Zahid, Jamal
Format:	Book chapter
Language:	English
Published:	School of Microelectronic Engineering 2013
Subjects:	Titanium
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/30798
Tags:	Add Tag No Tags, Be the first to tag this record!

Description
Summary:	Not Available