Study of the thickness of the Silicon Dioxide on wafer using Dry and Wet Oxidation method

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Bibliographic Details
Main Author: Mohamad Fadzli Ali
Other Authors: Ruslinda A. Rahim (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/1994
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Summary:Access is limited to UniMAP community.