Nanostructured Diamond-Like Carbon Films Grown by Off-Axis Pulsed Laser Deposition
Nanostructured diamond-like carbon (DLC) films instead of the ultrasmooth film were obtained by pulsed laser ablation of pyrolytic graphite. Deposition was performed at room temperature in vacuum with substrates placed at off-axis position. The configuration utilized high density plasma plume arrivi...
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主要な著者: | Yap, S.S., Nee, C.H., Yap, S.L., Tou, T.Y. |
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フォーマット: | 論文 |
出版事項: |
Hindawi Publishing Corporation
2015
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主題: | |
オンライン・アクセス: | http://eprints.um.edu.my/19397/ http://dx.doi.org/10.1155/2015/731306 |
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