Nanostructured Diamond-Like Carbon Films Grown by Off-Axis Pulsed Laser Deposition
Nanostructured diamond-like carbon (DLC) films instead of the ultrasmooth film were obtained by pulsed laser ablation of pyrolytic graphite. Deposition was performed at room temperature in vacuum with substrates placed at off-axis position. The configuration utilized high density plasma plume arrivi...
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| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Hindawi Publishing Corporation
2015
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/19397/ http://dx.doi.org/10.1155/2015/731306 |
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