XRD studies on residual stress of the diamond films grown using hot filament chemical vapour deposition technique on silicon nitride and tungsten carbide substrates

• Main Authors: Hamzah, Esah, Tze, Mi Yong, Chee, Kevin Mun Fai
• Format: Conference or Workshop Item
• Published: 2013
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://eprints.utm.my/id/eprint/51401/; https://www.scientific.net/AMR.686.325

This study analyses residual stress measurement using X-Ray diffraction method on ultrafine-polycrystalline diamonds and polycrystalline diamonds films grown using Hot Filament Chemical Vapour Deposition technique (HFCVD) on silicon nitride(Si3N4) and tungsten carbide (WC) substrates in the same cha...