Design and analysis of MEMS high sensitive capacitive pressure sensor

In this study, MEMS high sensitive capacitive pressure sensor based on poly-silicon diaphragm have been designed and analysed by using COMSOL Multiphysics Software. Three sensor designs: clamped, 8 slotted and 4 slotted with and without Teflon (polytetrafluoroethylene) coating were tested and compar...

Full description

Saved in:
Bibliographic Details
Main Authors: Ali, M., Soin, N., Noorakma, A.C.W., Yusof, N., Hatta, S.F.W.M.
Format: Article
Published: Medwell Journals 2016
Subjects:
Online Access:http://eprints.um.edu.my/18230/
http://medwelljournals.com/abstract/?doi=jeasci.2016.2688.2692
Tags: Add Tag
No Tags, Be the first to tag this record!
Be the first to leave a comment!
You must be logged in first