Focused ion beam machining of silicon
This paper optimizes the parameters of a focused gallium ion beam system for the micromachining of single-crystal silicon. The effect of the parameters on the surface integrity and material removal rate (MRR) were studied. The surface integrity and machined features were measured with a scanning pro...
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Main Authors: | Hung, NguyenPhu, Fu, Yongqi, Ali, Mohammad Yeakub |
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Format: | Article |
Language: | English |
Published: |
Elsevier BV
2002
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Subjects: | |
Online Access: | http://irep.iium.edu.my/27110/1/022_JMPT_127%282%29_256-260.pdf http://irep.iium.edu.my/27110/ http://www.sciencedirect.com/science/article/pii/S092401360200153X |
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