Surface roughness of ion-sputtered micromold

• Main Authors: Ali, Mohammad Yeakub, Bryan, N. K. A., Hung, W. N. P., Alauddin, M., Yuan, S.
• Format: Conference or Workshop Item
• Language: English
• Published: 2001
• Subjects: TJ Mechanical engineering and machinery; TS Manufactures
• Online Access: http://irep.iium.edu.my/27302/1/067_ICME_2001_Dhaka_207-212.pdf; http://irep.iium.edu.my/27302/

This paper discusses the development of mathematical models for the calculation of surface roughness of focused ion beam (FIB) sputtered microfeatures. The effective beam shape was characterized first and then the beam function was developed. Material function was developed from the inherent mater...