Fabrication of silicon nanopillar sheet for Cell Culture Dish

This paper discusses the fabrication of nanopillars using focused ion beam (FIB) sputtering. A 25 keV Ga+ FIB was used to machine the nanopillars. A reversed bitmap method was used to fabricate nanopillars where it milled the substrate all over except the nanopillar area. The height of the nanopilla...

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Bibliographic Details
Main Authors: Ali, Mohammad Yeakub, Mohd Fuad, Nurul Hajar
Format: Article
Language:English
Published: Trans Tech Publications, Switzerland 2011
Subjects:
Online Access:http://irep.iium.edu.my/2281/1/AMR_2011_Vol_264-265__1352-1356.pdf
http://irep.iium.edu.my/2281/
http://www.scientific.net
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