Application of focused ion beam for machining of nanopillar sheet
This report introduced focused ion beam (FIB) micromachining as a potential technique to fabricate Bio-MEMS microfluidic devices. This work investigated the influence of three FIB process parameters, which were acceleration voltage, dwell time and milled depth. The response variables were taper angl...
Saved in:
| Main Author: | |
|---|---|
| Format: | Monograph |
| Language: | English |
| Published: |
s.n
2011
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/28921/1/095_EDW_B0803-99_2011_Full_Version_of_Research_Report.pdf http://irep.iium.edu.my/28921/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|