Reliability and fatigue analysis in cantilever-based MEMS devices operating in harsh environments

• Main Authors: Tariq Jan, M., Hisham Bin Hamid, N., Md Khir, M.H., Ashraf, K., Shoaib, M.
• Format: Article
• Published: 2014
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893651288&doi=10.1155%2f2014%2f987847&partnerID=40&md5=b14ade815353443a2082d5388ab7dd5f; http://eprints.utp.edu.my/31362/

The microelectromechanical system (MEMS) is one of the most diversified fields of microelectronics; it is rated to be the most promising technology of modern engineering. MEMS can sense, actuate, and integrate mechanical and electromechanical components of micro- and nano sizes on a single silicon s...