Effects of Crack Faults on the Dynamics of Piezoelectric Cantilever-Based MEMS Sensor
The presence of cracks on the surface of MEMS microelectromechanical system (MEMS) devices affects their functional parameter, such as resonance frequency. Overtime, these cracks may cause the devices' failure. Therefore, it is important to identify the symptoms of the cracks presence so that t...
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| Main Authors: | , , , |
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| Format: | Article |
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Institute of Electrical and Electronics Engineers Inc.
2017
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85028954783&doi=10.1109%2fJSEN.2017.2737044&partnerID=40&md5=f8a47beb0e5c845b447248e0d2890e62 http://eprints.utp.edu.my/19345/ |
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