Electrical characterization of gold contact on porous silicon layers

• Main Authors: Hussin, Muhamad Hazwan Aizat, Zainal Abidin, Mastura Shafinaz
• Format: Conference or Workshop Item
• Language: English
• Published: 2017
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/97137/1/MasturaShafinazZainalAbidin2017_ElectricalCharacterizationofGoldContact.pdf; http://eprints.utm.my/id/eprint/97137/; http://dx.doi.org/10.1109/RSM.2017.8069138

Investigation on metallic contact on porous silicon (PS) layers is typically important before final integration into application devices. The electrical characterization of Au thickness of 100 nm and ∼210 nm on ∼3 μm and ∼6 μm PS thickness on PS were studied by measuring the current-voltage (I-V) re...