Junction formation with HWCVD and TCAD model of an epitaxial back contact solar cell
In this paper, we present morphological and electrical characteristics of a junction formed of Si p-type films deposited on an n-type silicon wafer using a hot wire chemical vapor deposition (HWCVD) tool. We describe the fabrication process and study the influence of diborane flow and postprocess an...
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Main Authors: | Rahman, T., Nawabjan, A., Tarazona, A., Bagnall, D. M., Boden, S. A. |
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Format: | Article |
Published: |
IEEE Electron Devices Society
2016
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Online Access: | http://eprints.utm.my/id/eprint/71776/ https://www.scopus.com/inward/record.uri?eid=2-s2.0-84994765324&doi=10.1109%2fJPHOTOV.2016.2598277&partnerID=40&md5=00511d5cbd0c57b61972aa83d59db479 |
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