Application of synopsys' taurus TCAD in developing CMOS fabrication process modules

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Bibliographic Details
Main Authors: Uda Hashim, Chin Seng Fatt, S. Sakrani
Format: Article
Language:English
Published: Universiti Malaysia Perlis 2009
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Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/5339
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