Optimization of home-built plasma enhanced chemical vapour deposition (PECVD) system
Carbon nanotubes (CNTs) have been receiving much attention for a wide variety of applications due to their unique electronic and mechanical properties. The plasma enhanced chemical vapour deposition (PECVD) method to synthesis carbon nanotubes (CNTs) is considered as an efficient production method o...
Saved in:
Main Authors: | Saidin, M. A. R., Ismail, Ahmad Fauzi, Aziz, M. |
---|---|
Format: | Conference or Workshop Item |
Language: | English |
Published: |
2007
|
Subjects: | |
Online Access: | http://eprints.utm.my/id/eprint/5515/1/M.A.R.Saidin2007_OptimizationOfHome-BuiltPlasma_.pdf http://eprints.utm.my/id/eprint/5515/ |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Similar Items
-
Optimization of home-built plasma enhanced chemical vapour deposition (PECVD) system
by: Saidin, M. A. R., et al.
Published: (2007) -
Growth of carbon nanofibers using plasma enhanced chemical vapour deposition
by: Saidin, Mohammad Abdul Razis
Published: (2010) -
Growth of plasma-enhanced chemical vapour deposition and hot filament plasma-enhanced chemical vapour deposition transfer-free graphene using a nickel catalyst
by: Othman, Maisara, et al.
Published: (2019) -
Nanocrystalline silicon thin films by RF plasma enhanced chemical vapour deposition
by: Han, S.C., et al.
Published: (2006) -
The structural and optical properties of hydrogenated amorphous carbon (a-C:H) thin films deposited using a direct current-plasma enhanced chemical vapour deposition (DC-PECVD) technique
by: Abu Bakar, Suriani
Published: (2005)