Optical properties measurements of nanocrystalline silicon thin films
Nanocrystalline silicon (nc-Si) thin films on 7059 corning glass substrate were prepared using Very High Frequency Plasma-Enhanced Chemical Vapour Deposition (VHF-PECVD) at different deposition temperatures. The nc-Si properties film were analyzed using spectroscopic ellipsometer, ultra violet (UV-V...
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Main Author: | Gan, Chee Hong |
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Format: | Thesis |
Language: | English |
Published: |
2011
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Subjects: | |
Online Access: | http://eprints.utm.my/id/eprint/33381/1/GanCheeHongMFS2011.pdf http://eprints.utm.my/id/eprint/33381/ http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:70042?queryType=vitalDismax&query=Optical+properties+measurements+of+nanocrystalline+silicon+thin+films&public=true |
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