Aluminium-induced crystallization of silicon thin film by excimer laser annealing
Polycrystalline silicon (poly-Si) film was fabricated by indirect process of re-crystallization of amorphous silicon (a-Si) thin film. This enhancement process is important to determine the performance of silicon thin film (STF). In this attempt, a fundamental study was carried out to enhance the cr...
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Article |
| Published: |
Sains Malaysiana
2013
|
| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/49013/ http://www.ukm.my/jsm/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|