Investigation on the effects of halo implants for nanoscale vertical MOSFET
To provide a platform for discussions of Solid State Science and Technology in all aspects of physical properties, chemistry, characterizations, preparation methods, optical properties, macro-,micro- and nano-structures. Besides that, modeling, simulation, measurement techniques as well as current d...
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Main Authors: | , , |
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Format: | Conference or Workshop Item |
Published: |
2007
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Subjects: | |
Online Access: | http://eprints.utm.my/id/eprint/24428/ |
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