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Investigation on the effects of halo implants for nanoscale vertical MOSFET

To provide a platform for discussions of Solid State Science and Technology in all aspects of physical properties, chemistry, characterizations, preparation methods, optical properties, macro-,micro- and nano-structures. Besides that, modeling, simulation, measurement techniques as well as current d...

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Main Authors: Ismail, Razali, Saad, Ismail, Arora, Vijay
Format: Conference or Workshop Item
Published: 2007
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utm.my/id/eprint/24428/
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id my.utm.24428
record_format eprints
spelling my.utm.244282017-08-03T00:04:35Z http://eprints.utm.my/id/eprint/24428/ Investigation on the effects of halo implants for nanoscale vertical MOSFET Ismail, Razali Saad, Ismail Arora, Vijay TK Electrical engineering. Electronics Nuclear engineering To provide a platform for discussions of Solid State Science and Technology in all aspects of physical properties, chemistry, characterizations, preparation methods, optical properties, macro-,micro- and nano-structures. Besides that, modeling, simulation, measurement techniques as well as current development in technology will also be discussed. 2007 Conference or Workshop Item PeerReviewed Ismail, Razali and Saad, Ismail and Arora, Vijay (2007) Investigation on the effects of halo implants for nanoscale vertical MOSFET. In: The 23rd Regional Conferences Solid State Science and Technology 2007 (RCSSST 2007), 2007, Johor Bahru.
institution Universiti Teknologi Malaysia
building UTM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Malaysia
content_source UTM Institutional Repository
url_provider http://eprints.utm.my/
topic TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
Ismail, Razali
Saad, Ismail
Arora, Vijay
Investigation on the effects of halo implants for nanoscale vertical MOSFET
description To provide a platform for discussions of Solid State Science and Technology in all aspects of physical properties, chemistry, characterizations, preparation methods, optical properties, macro-,micro- and nano-structures. Besides that, modeling, simulation, measurement techniques as well as current development in technology will also be discussed.
format Conference or Workshop Item
author Ismail, Razali
Saad, Ismail
Arora, Vijay
author_facet Ismail, Razali
Saad, Ismail
Arora, Vijay
author_sort Ismail, Razali
title Investigation on the effects of halo implants for nanoscale vertical MOSFET
title_short Investigation on the effects of halo implants for nanoscale vertical MOSFET
title_full Investigation on the effects of halo implants for nanoscale vertical MOSFET
title_fullStr Investigation on the effects of halo implants for nanoscale vertical MOSFET
title_full_unstemmed Investigation on the effects of halo implants for nanoscale vertical MOSFET
title_sort investigation on the effects of halo implants for nanoscale vertical mosfet
publishDate 2007
url http://eprints.utm.my/id/eprint/24428/
_version_ 1643647470895366144
score 13.160551

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